Wiring structure and semiconductor device
AssigneeMaterial Concept, Inc.
InventorJunichi Koike
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AssigneeMaterial Concept, Inc.
InventorJunichi Koike
Estimating the term…
To provide a wiring material which does not require a diffusion barrier layer and exhibits excellent conductivity and adhesion property between a conductor and an insulator and a semiconductor element using the same. The wiring structure of the present invention includes a conductor containing an intermetallic compound and an insulator layer. The intermetallic compound preferably contains two or more kinds of metal elements selected from the group consisting of Al, Fe, Co, Ni, and Zn. In addition, the intermetallic compound is preferably one or more kinds selected from an intermetallic compound containing Al and Co, an intermetallic compound containing Al and Fe, an intermetallic compound containing Al and Ni, an intermetallic compound containing Co and Fe, or an intermetallic compound containing Ni and Zn.
A wiring structure of a semiconductor element, the wiring structure comprising a conductor containing a thin film of an intermetallic compound and an insulator layer,
A semiconductor device comprising a semiconductor element, a wiring structure, and a circuit, wherein the wiring structure includes a conductor containing a thin film of an intermetallic compound and an insulator layer and connects the semiconductor element and the circuit to each other,
Dependencies are inferred from the claim text.