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US 11,454,882 B2Granted
Pellicle for reflective mask
AssigneeSamsung Electronics Co., Ltd.
InventorsJinhwan Lee, Jeonggil Kim, Sunghyup Kim
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Abstract
A pellicle for a reflective mask includes a pellicle body, a pellicle frame below the pellicle body to support the pellicle body, and a pattern structure in at least a part of a surface of the pellicle body, wherein the pattern structure includes a plurality of patterns.
Claims20
A pellicle for a reflective mask, the pellicle comprising:
- a pellicle body;
- a pellicle frame to support the pellicle body;
- and
- a pattern structure in at least a part of a surface of the pellicle body, the pattern structure being integral to and of a same body as the pellicle body,
- wherein the pattern structure comprises a plurality of patterns.
2 more elements
A pellicle for a reflective mask, the pellicle comprising:
- a pellicle body;
- a pellicle frame to support the pellicle body;
- and
- a first pattern structure and a second pattern structure spaced apart from each other on a surface of the pellicle body the first and second pattern structures being integral to and of a same body as the pellicle body,
- wherein the first pattern structure comprises a plurality of first patterns spaced apart from each other, and the second pattern structure comprises a plurality of second patterns spaced apart from each other.
2 more elements
A pellicle for a reflective mask, the pellicle comprising:
- a pellicle body;
- a pellicle frame at a periphery of the pellicle body to support the pellicle body and including an upper portion which supports the pellicle body, wherein a width of the upper portion of the pellicle frame is greater than a width of a lower portion of the pellicle frame;
- and
- a pattern structure including a plurality of patterns on the entire surface of the pellicle body,
- wherein the plurality of patterns comprise concavo-convex patterns which are configured in the same body as the pellicle body and include a plurality of concave patterns and a plurality of convex patterns.
2 more elements
Dependencies are inferred from the claim text.