Scanning type probe microscope and control device for scanning type probe microscope

A scanning type probe microscope comprising:

• a cantilever provided on a tip end thereof with a probe;
• an optical system configured to emit laser light to the cantilever and detect the laser light reflected by the cantilever;
• a measurement unit configured to measure characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system;
• a laser light adjustment unit configured to adjust, when adjusting an optical axis of the laser light, a spot diameter of the laser light to be larger than that of the spot diameter when measuring the characteristics of the sample;
• an imaging unit configured to capture an image of a range including a position of the probe when adjusting the optical axis of the laser light;
• an image processing unit configured to specify a position of a part or an entirety of the spot of the laser light in the image captured by the imaging unit;
• and
• an optical axis adjustment unit configured to adjust an optical axis of the laser light based on the specified position.

A control device for a scanning type probe microscope,

• wherein the scanning probe microscope comprises:
• a cantilever provided on a tip end thereof with a probe;
• an optical system configured to emit laser light to the cantilever and detect the laser light reflected by the cantilever;
• a measurement unit configured to measure characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system;
• and
• an imaging unit configured to capture an image of a range including a position of the probe when adjusting the optical axis of the laser light,
• wherein the control device includes:
• a laser light adjustment unit configured to adjust, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of the sample;
• an image processing unit configured to specify a position of a part or an entirety of the spot of the laser light in the image captured by the imaging unit;
• and
• an optical axis adjustment unit configured to adjust the optical axis of the laser light based on the specified position.