Retaining ring having inner surfaces with features
AssigneeApplied Materials, Inc.
InventorsSteven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate
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Abstract
Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.
Claims13
A method of forming a retaining ring, comprising:
- joining an upper portion of the retaining ring having a frustoconical inner surface to a lower portion of the retaining ring having a cylindrical inner surface;
- and
- machining the inner surface of the lower portion and the inner surface of the upper portion to form a plurality of flat facets that intersect the frustoconical inner surface at a plurality of curved edges.
Dependencies are inferred from the claim text.