Acoustic wave device, filter, and multiplexer
AssigneeTaiyo Yuden Co., Ltd.
InventorsMasafumi Iwaki, Yoshio Satoh
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Abstract
An acoustic wave device includes: a Y-cut X-propagation lithium tantalate substrate having a cut angle of 5° or greater and 18° or less; and a grating electrode that is formed of one or more metal films stacked on the lithium tantalate substrate, a number of the one or more metal films being n (n is a natural number), excites an acoustic wave, and meets a condition: 0.16 λ ≤ ∑ i = 1 n ( hi × ρ i ρ 0 ) ≤ 0.24 λ where ρi represents a density of each metal film of the one or more metal films, hi represents a film thickness of the each metal film, ρ0 represents a density of Mo, and λ represents a pitch.
Claims14
An acoustic wave device comprising:
- a Y-cut X-propagation lithium tantalate substrate having a cut angle of 5° or greater and 19° or less;
- and
- a grating electrode that is formed of one or more metal films stacked on the lithium tantalate substrate, a number of the one or more metal films being n (n is a natural number), excites an acoustic wave, and meets a condition:
- 0.16
-
- λ
- ≤
- ∑
- i
- =
- 1
- n
-
-
- (
- hi
- ×
- ρ
-
-
- i
- ρ
-
-
- 0
- )
- ≤
- 0.24
-
- λ
- where ρi represents a density of each metal film of the one or more metal films, hi represents a film thickness of the each metal film, ρ0 represents a density of Mo, and λrepresents a pitch.
An acoustic wave device comprising:
- a Y-cut X-propagation lithium tantalate substrate having a cut angle of 5° or greater and 18° or less, and
- a grating electrode that is located on the lithium tantalate substrate, and excites an acoustic wave, a primary mode of the acoustic wave being an SH-type oscillation mode, an acoustic velocity of the acoustic wave being lower than an acoustic velocity of Rayleigh mode spurious.
Dependencies are inferred from the claim text.