System and method for controlling the placement of fluid resist droplets

An imprint lithography system comprising:

• a fluid supply containing a fluid that is a formable material, the formable material containing a monomer mixture;
• a filtered resist recirculation system and reservoir;
• a fluid supply line;
• a fluid return line;
• a piezoelectric fluid dispenser configured to dispense a plurality of droplets of the fluid from the reservoir at a plurality of locations onto a substrate with an experimentally determined drop placement accuracy for droplets that have a fluid volume that is less than 1.2 pL, and the drop placement accuracy varies with the fluid temperature of the fluid being circulated through the fluid dispenser;
• a temperature control system configured to maintain a fluid temperature of the fluid prior to being circulated through the fluid dispenser and dispensed by the fluid dispenser, at greater than 23° C.;
• and
• a temperature control manifold;
• wherein the fluid dispenser has an experimentally determined drop placement accuracy metric for the fluid that is less than a first threshold when while the temperature control system controls the fluid temperature to be greater than 23° C.;
• wherein the fluid dispenser has the experimentally determined drop placement accuracy metric that is greater than the first threshold while the temperature control system controls the fluid temperature to be less than or equal to 20.5° C.;
• and
• a controller configured to cause a voltage waveform to be applied to the piezoelectric fluid dispenser such that the fluid droplet volume is less than 1.2 pL while the temperature control system maintains the fluid temperature of the fluid circulating through the piezoelectric fluid dispenser at greater than 23° C., wherein the drop placement accuracy metric of the piezoelectric fluid dispenser is less than the first threshold when the fluid temperature is greater than 23° C., and the drop placement accuracy metric of the piezoelectric fluid dispenser is greater than the first threshold when the fluid temperature is less than 20.5° C.;
• and
• wherein, each of the plurality of droplets dispensed by the fluid dispenser has a fluid volume that is less than 1.2 pL.