Pellicle transfer apparatus and method

A pellicle transfer apparatus, comprising:

• a base supporting a target plate, a pellicle and a flexible plate sequentially stacked on the base;
• and
• a roller unit laterally movable in a first direction across the base and including a lower roller extending in a second direction intersecting the first direction, and an upper roller above the lower roller and extending in the second direction,
• wherein the lower roller is configured to directly adhere to and compress the flexible plate while the roller unit laterally moves in the first direction across the base to bond the pellicle to the target plate, as the pellicle is separated from the flexible plate, and the lower roller is further configured to rotate to lift the flexible plate upward to wrap the flexible plate around the lower roller, and
• the upper roller is configured to contact the flexible plate as it wraps around the lower roller.

A pellicle transfer method, comprising:

• placing a target plate on a base;
• placing a flexible plate having a pellicle attached to a bottom surface of the flexible plate to cover the target plate;
• and
• moving a roller unit, including a lower roller and an upper roller above the lower roller, in a first direction across the base, such that the lower roller compresses the flexible plate to bond the pellicle to the target plate, as the pellicle separates from the flexible plate and the flexible plate moves upward to wrap around the lower roller, and the upper roller contacts the flexible plate as it wraps around the lower roller.