Interfacial layer for high resolution lithography (HRL) and high speed input/output (IO or I/O) architectures
AssigneeIntel Corporation
InventorsSuddhasattwa Nad, Rahul Manepalli, Marcel Wall
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AssigneeIntel Corporation
InventorsSuddhasattwa Nad, Rahul Manepalli, Marcel Wall
Estimating the term…
Embodiments described herein are directed to interfacial layers and techniques of forming such interfacial layers. An interfacial layer having one or more light absorbing molecules is on a metal layer. The light absorbing molecule(s) may comprise a moiety exhibiting light absorbing properties. The interfacial layer can assist with improving adhesion of a resist layer to the metal layer and with improving use of one or more lithography techniques to fabricate interconnects and/or features using the resist and metal layers for a package substrate, a semiconductor package, or a PCB. For one embodiment, the interfacial layer includes, but is not limited to, an organic interfacial layer. Examples of organic interfacial layers include, but are not limited to, self-assembled monolayers (SAMs), constructs and/or variations of SAMs, organic adhesion promotor moieties, and non-adhesion promoter moieties.
A package substrate comprising:
A semiconductor package comprising:
A printed circuit board (PCB) comprising:
Dependencies are inferred from the claim text.