Resonator electrode shields

A semiconductor device comprising:

• a support element;
• a microelectromechanical system (MEMS) resonator having a body capable of deflecting and having an active portion, resonant motion of which is to be sensed;
• an electrode to provide a time-varying voltage to cause the MEMS body to deflect in resonant motion relative to the support element during operation of the semiconductor device;
• and
• a conductive element to be tied to a ground potential, the conductive element disposed so as to impede existence of an electrostatic field between the active portion of the MEMS body and the support element.

A method of manufacturing a semiconductor device, the method comprising:

• providing a support element;
• providing a microelectromechanical system (MEMS) body capable of deflecting and having an active portion, motion of which is to be sensed;
• providing an electrode to cause the MEMS body to deflect relative to the support element during operation of the semiconductor device;
• and
• providing a conductive element to be tied to a predetermined potential, the conductive element disposed so as to impede existence of an electrostatic field between the active portion of the MEMS body and the support element.