Self-aligned gate endcap (SAGE) architecture having gate or contact plugs
AssigneeIntel Corporation
InventorsSairam Subramanian, Walid M. Hafez
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AssigneeIntel Corporation
InventorsSairam Subramanian, Walid M. Hafez
Estimating the term…
Self-aligned gate endcap (SAGE) architectures having gate or contact plugs, and methods of fabricating SAGE architectures having gate or contact plugs, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first and second semiconductor fins and laterally between and in contact with the first and second gate structures. A gate plug is over the gate endcap isolation structure and laterally between the first gate structure and the second gate structure. A crystalline metal oxide material is laterally between and in contact with the gate plug and the first gate structure, and laterally between and in contact with the gate plug and the second gate structure.
An integrated circuit structure, comprising:
An integrated circuit structure, comprising:
A computing device, comprising:
Dependencies are inferred from the claim text.