US 11,444,079 B2 · Semiconductor device

Abstract

A semiconductor device includes: a semiconductor substrate; a VNW transistor being a functional element provided with a first projection formed on the semiconductor substrate, having a semiconductor material, and having a lower end and an upper end; a dummy functional element provided with a second projection formed on the semiconductor substrate, having a semiconductor material, having a lower end and an upper end, and arranged side by side with the first projection; and a first wiring formed above the first projection and above the second projection, electrically connected to the upper end of the first projection, and electrically isolated from the upper end of the second projection. Consequently, the semiconductor device capable of suppressing variation in characteristics of the VNW transistors is realized.

Claims17

Dependent claims

A semiconductor device, comprising:

a semiconductor substrate;
a functional element provided with a first projection formed on the semiconductor substrate, having a semiconductor material, and having a lower end and an upper end;
a contact plug;
a dummy functional element provided with a second projection formed on the semiconductor substrate, having a semiconductor material, having a lower end and an upper end that are electrically connected via the contact plug, and arranged side by side with the first projection in a plane view;
and
a first wiring formed above the first projection and above the second projection, electrically connected to the upper end of the first projection, and electrically isolated from the upper end of the second projection.

3 more elements

A semiconductor device, comprising:

a semiconductor substrate;
a functional element provided with a first projection formed on the semiconductor substrate, having a semiconductor material, and having a lower end and an upper end;
a dummy functional element provided with a second projection formed on the semiconductor substrate, having a semiconductor material, having a lower end and an upper end, and arranged side by side with the first projection in a plane view;
a first wiring formed above the first projection and above the second projection, electrically connected to the upper end of the first projection, and electrically isolated from the upper end of the second projection;
a first electrode formed on side surfaces of the first projection;
and
a second electrode formed on side surfaces of the second projection, and electrically isolated from the first electrode,
wherein the upper end of the second projection and the lower end of the second projection of the dummy functional element, and the second electrode are electrically connected.

5 more elements

Dependencies are inferred from the claim text.

Semiconductor device

Life of this patent

Semiconductor device

Life of this patent

Abstract

Claims17