Back to results
US 11,444,078 B2Granted
ESD protection element
AssigneeMurata Manufacturing Co., Ltd.
InventorNoriyuki Ueki
Life of this patent
Estimating the term…
Abstract
An ESD protection element includes a semiconductor substrate, a wiring layer, and an inductor conductor. The semiconductor substrate includes a Zener diode. The inductor conductor is provided on the wiring layer and has a two-dimensional spiral shape. The inductor conductor includes a first inductor conductor and a second inductor conductor that are continuously provided from an outer peripheral end toward an inner peripheral end, and a connection conductor portion in a vicinity of a portion at which the first inductor conductor and the second inductor conductor are connected to each other. The second inductor conductor has a width smaller than a width of the first inductor conductor.
Claims23
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- an inductor conductor disposed in the wiring layer and having a spiral shape in a plan view of the wiring layer and that includes an outer peripheral end and an inner peripheral end;
- and
- first, second and third external connection terminals disposed in or on the wiring layer;
- wherein the inductor conductor includes:
- a first inductor conductor disposed on an outer peripheral side that includes the outer peripheral end;
- a second inductor conductor disposed on an inner peripheral side that includes the inner peripheral end;
- and
- a connection conductor that connects the first inductor conductor to the second inductor conductor;
- wherein the outer peripheral end of the inductor conductor is directly connected to the first external connection terminal;
- wherein the inner peripheral end of the inductor conductor is connected to the second external connection terminal;
- wherein the third external connection terminal is connected to the surge absorbing element by at least one interlayer connection conductor that extends through the wiring layer with the spiral shape of the inductor conductor surrounding the at least one interlayer connection conductor;
- wherein the inductor conductor is not physically connected to the at least one interlayer connection conductor;
- wherein the first inductor conductor and the second inductor conductor are connected in series and are coplanar to each other extending in the plan view of the wiring layer;
- wherein the first inductor conductor is disposed concentrically with the second inductor conductor;
- and
- wherein respective portions of the first inductor conductor and the second inductor conductor extend parallel to each other.
15 more elements
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- first, second and third external connection terminals disposed in or on the wiring layer;
- and
- an inductor conductor disposed in the wiring layer and having a spiral shape in a plan view of the wiring layer, wherein the inductor conductor includes:
- a first inductor conductor disposed on an outer peripheral side of the inductor conductor and directly connected to the first external connection terminal;
- a second inductor conductor disposed on an inner peripheral side of the inductor conductor and connected to the second external connection terminal;
- a connection conductor between the first and second inductor conductors and connected to the third external connection terminal via the surge absorbing element,
- wherein the first inductor conductor and the second inductor conductor are connected in series and are coplanar to each other extending in the plan view of the wiring layer,
- wherein the first inductor conductor is disposed concentrically with the second inductor conductor,
- wherein respective portions of the first inductor conductor and the second inductor conductor extend parallel to each other, and
- wherein the third external connection terminal is connected to the surge absorbing element by at least one interlayer connection conductor that extends through the wiring layer with the spiral shape of the inductor conductor surrounding the at least one interlayer connection conductor, such that the inductor conductor is not physically connected to the at least one interlayer connection conductor.
9 more elements
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- and
- an inductor conductor disposed in the wiring layer and having a spiral shape including an outer peripheral end and an inner peripheral end, the inductor conductor including:
- a first inductor conductor disposed on an outer peripheral side that includes the outer peripheral end;
- a second inductor conductor disposed on an inner peripheral side that includes the inner peripheral end;
- and
- a connection conductor that connects the first inductor conductor to the second inductor conductor;
- wherein the first inductor conductor is coplanar and disposed concentrically with the second inductor conductor,
- wherein respective portions of the first inductor conductor and the second inductor conductor extend parallel to each other, and
- wherein an external connection terminal is connected to the surge absorbing element by at least one interlayer connection conductor that extends through the wiring layer with the spiral shape of the inductor conductor surrounding the at least one interlayer connection conductor, such that inductor conductor is not physically connected to the at least one interlayer connection conductor.
8 more elements
Dependencies are inferred from the claim text.