Method for manufacturing a microelectronic device integrating a physical unclonable function provided by resistive memories, and said device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsChristelle Charpin-Nicolle, Florian Pebay-Peyroula
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Abstract
A microelectronic device and method for manufacturing a microelectronic device comprising a plurality of resistive memories, a part of these resistive memories, called PUF memories, forming a PUF, the rest of these resistive memories being known as storage memories. The manufacturing process comprising forming a dielectric layer having on at least one contact surface in contact with an electrode a surface roughness of said surface greater than that of the same dielectric layer of the storage memories.
Claims15
A method for manufacturing a microelectronic device comprising a plurality of resistive memories, a first part of these resistive memories being configured to form an unclonable physical function, better known as the acronym PUF, the resistive memories of said first part of resistive memories being said PUF memories, a second part of resistive memories being to provide a memory function to the microelectronic device, the resistive memories of the second part being called storage memories, the manufacturing method comprising the following steps of:
- providing a support comprising a plurality of first metal electrodes,
- for each first electrode, forming a dielectric layer portion comprising a first contact surface facing the corresponding first electrode and a second surface opposite to the first contact surface, the dielectric layer portions for forming the PUF memories having, on at least one of the first contact surface and the second surface, a surface roughness greater than that of the same surface of the dielectric layer portions for forming the storage memories,
- for each dielectric layer portion, forming a second electrode facing the second surface, said second surface then being a second contact surface facing the second electrode and the dielectric layer portion being interposed between the first and second electrodes, the resistive memories being thus formed.
A microelectronic device comprising a plurality of resistive memories, a first part of these resistive memories being configured to form an unclonable physical function, better known as the acronym PUF, the resistive memories of said first part of resistive memories being called PUF memories, a second part of resistive memories being to provide a memory function to the microelectronic device, the resistive memories of the second part being called storage memories, the device comprising a support, each resistive memory comprising:
- a first metal electrode and a second metal electrode, the first electrode being arranged in a support,
- a dielectric layer portion interposed between the first and second electrodes and having a first contact surface facing the first electrode and a second contact surface facing the second electrode,
- wherein the dielectric layer portions of the PUF memories have, on at least one of the first contact surface and the second contact surface, a surface roughness of said surface greater than that of the same surface of the dielectric layer portions of the storage memories.
Dependencies are inferred from the claim text.