Robot for simultaneous substrate transfer

A method of transferring a substrate, the method comprising:

• receiving a substrate at a first substrate support within a transfer region of a substrate processing system, wherein the transfer region is fluidly coupled with a plurality of processing regions disposed above the transfer region, and wherein the substrate processing system includes a transfer apparatus positioned within the transfer region and comprising:
• a central hub including a first shaft and a second shaft extending about and concentric with the first shaft,
• an eccentric hub extending at least partially through the central hub, wherein the eccentric hub is radially offset from a central axis of the central hub, and wherein the eccentric hub is coupled with the first shaft of the central hub, and
• an end effector coupled with the eccentric hub, the end effector comprising a plurality of arms;
• engaging the substrate with an arm of the plurality of arms;
• rotating the second shaft in a first direction about the central axis of the central hub;
• rotating the first shaft in the first direction about the central axis of the central hub at a fixed ratio with the second shaft to radially reposition the substrate about the central axis within the transfer region;
• and
• delivering the substrate to a second substrate support within the transfer region of the substrate processing system, wherein each of the first substrate support and the second substrate support is at a fixed horizontal position relative to the central hub.

A substrate processing system comprising:

• a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions above the transfer region, wherein a sidewall of the transfer region housing defines a sealable access for providing and receiving substrates;
• a plurality of substrate supports disposed within the transfer region;
• and
• a transfer apparatus positioned within the transfer region comprising:
• a central hub including a first shaft and a second shaft extending about the first shaft, wherein the second shaft is counter-rotatable with the first shaft, and wherein the central hub is characterized by a central axis, wherein each of the plurality of substrate supports is at a fixed horizontal position relative to the central hub,
• an eccentric hub extending at least partially through the central hub, wherein the eccentric hub is radially offset from the central axis of the central hub, and wherein the eccentric hub is coupled with the first shaft of the central hub with one or more linkages, and
• an end effector coupled with the eccentric hub, the end effector comprising a plurality of arms having a number of arms equal to a number of substrate supports of the plurality of substrate supports.