Substrate processing apparatus

A substrate processing apparatus comprising:

• an indexer section which holds a container that contains a substrate;
• a processing section including a plurality of processing units each including a processing chamber in which the substrate is processed;
• a transfer path along which the substrate is conveyed as it is transferred between the container held by the indexer section and the plurality of processing units, the transfer path extending to pass by a lateral side of each of the plurality of processing units, and the plurality of processing units are arranged on both sides of the transfer path so as to face one another across the transfer path;
• a reception/delivery region arranged within the transfer path;
• a first transfer robot, located in the indexer section, which carries the substrate into and out of the container held by the indexer section and which accesses the reception/delivery region;
• a second transfer robot, located in the processing section, which receives and delivers the substrate from and to the first transfer robot via the reception/delivery region and which carries the substrate into and out of each of the plurality of processing units;
• a second transfer robot raising/lowering unit which is arranged within the transfer path and which includes a drive motor that raises and lowers the second transfer robot in an up/down direction, and a rail that guides the raising and lowering of the second transfer robot in the up/down direction, and
• a cover which shields an atmosphere around the reception/delivery region and an atmosphere around the plurality of processing units from each other, the cover being disposed inside a perimeter of the processing section and outside a perimeter of the indexer section,
• wherein the reception/delivery region and the second transfer robot raising/lowering unit are both located between the first transfer robot and the second transfer robot at a region within the transfer path across which the plurality of the processing units face one another,
• wherein the cover is attached to at least one of the plurality of processing units and the second transfer robot raising/lowering unit such that a portion of the transfer path is blocked with the cover and the second transfer robot raising/lowering unit.