Automated substrate holder loading device

Substrate holder loading device,

• wherein the substrate holder loading device contains a substrate holder guiding element, a drive unit, a movement mechanism, a substrate holder handling element, a pressing tool, and an opening mechanism,
• wherein the drive unit is connected to the movement mechanism,
• wherein the movement mechanism is connected to the substrate holder handling element,
• wherein the movement mechanism is adapted to transmit the propulsion from the drive unit to the substrate holder handling element to provide a rotation of the substrate holder handling element along an axis essentially parallel to a surface of the substrate, wherein the substrate holder handling element is adapted to rotate by about 180°,
• wherein the substrate holder handling element is adapted to reversibly fasten a substrate holder and wherein the substrate holder handling element contains the opening mechanism,
• wherein the opening mechanism is adapted to automatically open and close the substrate holder, and
• wherein the movement mechanism contains a stepping gear or wherein the drive unit is a step motor, or wherein both the movement mechanism contains a stepping gear and the drive unit is a step motor
• wherein the pressing tool adapted to press at least two parts of the substrate holder together, wherein the pressing tool contains at least one sliding element, wherein the at least one sliding element is in conjunction with at least one vacuum element adapted to extract fine particles set free at the at least one sliding element.