US 11,443,962 B2 · Integrated handling system for semiconductor articles

Abstract

Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.

Claims20

Dependent claims

A method for transferring an article having multiple portions, the method comprising:

moving the article, by a transfer mechanism, directly between a first station and a second station, wherein the multiple portions of the article are in an assembled configuration at the first station;
and
passing the article, supported on the transfer mechanism, past a member during the movement of the transfer mechanism, with the article supported thereon, from the first station to the second station through the member, wherein the member disassembles the multiple portions of the article supported on the transfer mechanism coincident with the passing of the transfer mechanism through the member, such that the member disassembles the multiple portions of the article on-the-fly during the article passing past the member;
wherein the multiple portions are disposed in separate locations in the second station.

1 more element

Dependencies are inferred from the claim text.

Integrated handling system for semiconductor articles

Life of this patent

Integrated handling system for semiconductor articles

Life of this patent

Abstract

Claims20