Substrate support and plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsTakehiro Ueda, Jun Hirose
Life of this patent
Estimating the term…
Abstract
A substrate support for use in a plasma processing chamber includes a substrate support body, a lifter pin and a lift mechanism. The substrate support body has a pin through-hole and the pin through-hole has a female-threaded inner wall. The lifter pin has a base segment, an intermediate segment, and a leading segment. The lifter pin is inserted into the pin through-hole, the intermediate segment is male-threaded, and the male-threaded intermediate segment is screwable to the female-threaded inner wall. The lift mechanism is configured to vertically move the lifter pin relative to the substrate support body.
Claims12
A substrate support for use in a plasma processing chamber, comprising:
- a body having a pin through-hole, the pin through-hole having a female-threaded inner wall;
- a lifter pin having a base segment, an intermediate segment, and a leading segment, the lifter pin being inserted into the pin through-hole, the intermediate segment being male-threaded, the male-threaded intermediate segment being screwable to the female-threaded inner wall;
- and
- a lift mechanism to vertically move the lifter pin relative to the body,
- wherein the lifter pin is movable between an upper position and a lower position, and wherein the male-threaded intermediate segment of the lifter pin is released from the female-threaded inner wall while the lifter pin is at the upper position.
A plasma processing apparatus, comprising:
- a chamber having a plasma processing space;
- a plasma generator to form a plasma from at least one gas in the plasma processing space;
- and
- a substrate support disposed in the plasma processing space, the substrate support comprising:
- a body having a pin through-hole, the pin through-hole having a female-threaded inner wall;
- a lifter pin having a base segment, an intermediate segment, and a leading segment, the lifter pin being inserted into the pin through-hole, the intermediate segment being male-threaded, the male-threaded intermediate segment being screwable to the female-threaded inner wall;
- and
- a lift mechanism to vertically move the lifter pin relative to the body,
- wherein the lifter pin is movable between an upper position and a lower position, and wherein the male-threaded intermediate segment of the lifter pin is released from the female-threaded inner wall while the lifter pin is at the upper position.
Dependencies are inferred from the claim text.