Radio frequency ground system and method

A method of processing a substrate, comprising:

• positioning a substrate on a substrate support in a volume formed by a chamber wall, a lid, and a bottom of a processing chamber, the substrate support disposed in the volume opposite the lid, the substrate support comprising a support body disposed on a stem, a ground plate disposed between the support body and the stem, an isolation plate disposed between the support body and the ground plate, the isolation plate at least partially providing electrical isolation between the support body and the ground plate, and a circular top flange coupled to a lower peripheral surface the ground plate, the processing chamber comprising a circular bottom flange coupled to the bottom of the chamber, and a plurality of straps, each of the straps comprising a first end coupled to the circular bottom flange and a second end coupled to the circular top flange;
• raising the substrate support to a raised position forming an upper portion of the volume;
• introducing a gas to the upper portion of the volume;
• and
• activating the gas using radio frequency energy supplied to the substrate body, the radio frequency energy flowing from the substrate body, to the activated gas in the volume of the process chamber to the bottom of the chamber, up the plurality of straps to the ground plate, wherein the circular bottom flange comprises a central opening disposed therethrough for providing access for a radio frequency supply feedthrough.

An apparatus, comprising:

• a circular top flange comprising a top flange upper surface and a top flange lower surface;
• a circular bottom flange comprising a bottom flange upper surface and a bottom flange lower surface, the circular bottom flange comprising a lower portion extending radially inward from an inner diameter of the circular bottom flange, the lower portion comprising one or more apertures configured to receive screws;
• and
• a plurality of straps, each of the straps comprising a first end coupled to the circular bottom flange and a second end coupled to the circular top flange, each of the plurality of straps positioned symmetrically about the circular top flange and capable of flexing radially inward to a center of the circular top flange, wherein each strap comprises a spring constant of from 17 lb/in to about 20 lb/in.