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US 11,443,916 B2Granted
Thin pellicle material for protection of solid-state electron detectors
AssigneeKLA Corporation
InventorWilliam G. Schultz
Life of this patent
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Abstract
An electron beam system and method are provided. The system includes a detector having a detector face configured to detect back-scattered electrons reflected off of a sample. The system further includes an annular cap disposed on the detector face, and a protective pellicle disposed on the annular cap, covering the detector face. The protective pellicle is transparent to back-scattered electrons and provides a physical barrier to particles directed at the detector face.
Claims15
An electron beam system comprising:
- a detector comprising a detector face configured to detect back-scattered electrons reflected off of a sample;
- an annular cap disposed on the detector face;
- and
- a protective pellicle disposed on the annular cap, covering the detector face;
- wherein the protective pellicle is transparent to back-scattered electrons and provides a physical barrier to particles directed at the detector face.
2 more elements
A method comprising:
- generating an electron beam using an electron beam source;
- directing the electron beam toward a surface of a sample;
- generating back-scattered electrons and particles at the surface of the sample based on interaction between the electron beam and the sample, the back-scattered electrons and particles being emitted away from the surface of the sample;
- detecting the back-scattered electrons on a detector face of a detector;
- preventing the particles from reaching the detector face by a protective pellicle, the protective pellicle being disposed on an annular cap on the detector face, transparent to the back-scattered electrons, and providing a physical barrier to the particles directed at the detector face.
2 more elements
Dependencies are inferred from the claim text.