Charged-particle beam device and cross-sectional shape estimation program

A charged-particle beam device for irradiating a sample with a charged-particle beam, the device comprising:

• a charged particle source that emits the charged-particle beam;
• a detector that detects a charged particle generated by irradiating the sample with the charged-particle beam, and outputs a detection signal indicating intensity of the charged particle;
• an energy discriminator that discriminates the charged particle in accordance with energy possessed by the charged particle before the detector detects the charged particle;
• and
• an arithmetic element that uses the detection signal output by the detector to generate a brightness image of the sample,
• wherein the arithmetic element generates the brightness image having a pixel corresponding to an irradiation position of the charged particle and having a brightness value corresponding to the detection signal at the irradiation position,
• the arithmetic element determines a brightness ratio between the irradiation position and a reference position on the sample when the brightness value at the irradiation position changes from a brightness value at the reference position,
• the arithmetic element generates the brightness image while changing a parameter varying a signal amount at a time of detection of the charged particle, and specifies the parameter at which the brightness ratio is at a minimum to determine a position of a defect inside the sample in a depth direction, and
• the arithmetic element determines a size of the defect in the depth direction in accordance with magnitude of the brightness ratio.