Magnetic core for integrated magnetic devices

An electromagnetic device, comprising:

• an opening within a core dielectric layer of a first dielectric material, the core dielectric layer having a top surface and side surfaces within the opening;
• and
• a magnetic core within the opening, the magnetic core having a core top surface located below the dielectric layer top surface and having a first width, and sloped sidewalls that slope from the top surface towards the side surfaces to a bottom core surface located between the top surface and a device substrate and having a second width greater than the first width,
• wherein the magnetic core layer includes magnetic material layers, adjacent ones of the magnetic material layers being separated by a barrier layer.

An integrated magnetic device, comprising:

• a substrate;
• a first trench structure and a second trench structure adjacent to the substrate, the first trench structure adjacent the second trench structure;
• a magnetic core having a first magnetic core portion in the first trench structure and a second magnetic core portion in the second trench structure, each magnetic core portion having a top surface and a wider bottom surface;
• and
• an upper dielectric layer disposed over the magnetic core.

An integrated magnetic device, comprising:

• a substrate;
• a trench structure adjacent to the substrate;
• a magnetic core in the trench structure, the magnetic core having a top surface and a bottom surface between the top surface and the substrate, the bottom surface wider than the top surface;
• an upper dielectric layer disposed over the magnetic core,
• wherein the magnetic core includes magnetic material layers that are flat and parallel to a bottom of the trench structure;
• and
• the magnetic material layers includes a metal selected from the group consisting of iron, nickel, and cobalt.

An integrated magnetic device, comprising:

• a substrate;
• a trench structure adjacent to the substrate;
• a magnetic core in the trench structure, the magnetic core having a top surface and a bottom surface between the top surface and the substrate, the bottom surface wider than the top surface;
• an upper dielectric layer disposed over the magnetic core;
• and
• a lower encapsulation layer in the trench structure under the magnetic core.

An integrated magnetic device, comprising:

• a substrate;
• a trench structure adjacent to the substrate;
• a magnetic core in the trench structure, the magnetic core having a top surface and a bottom surface between the top surface and the substrate, the bottom surface wider than the top surface;
• an upper dielectric layer disposed over the magnetic core;
• and
• an upper encapsulation layer in the trench structure over the magnetic core.

An integrated magnetic device, comprising:

• a substrate;
• a trench structure adjacent to the substrate;
• a magnetic core in the trench structure, the magnetic core having a top surface and a bottom surface between the top surface and the substrate, the bottom surface wider than the top surface;
• an upper dielectric layer disposed over the magnetic core,
• wherein the trench structure is a first trench structure, and further comprising a second trench structure adjacent to the substrate;
• and
• the magnetic core is also located in the second trench structure, below an opening of the second trench structure.

An electromagnetic device, comprising:

• an opening within a core dielectric layer of a first dielectric material, the core dielectric layer having a top surface and side surfaces within the opening;
• and
• a magnetic core within the opening, the magnetic core having a core top surface located below the dielectric layer top surface and having a first width, and sloped sidewalls that slope from the top surface towards the side surfaces to a bottom core surface located between the top surface and a device substrate and having a second width greater than the first width;
• and
• a dielectric layer of a second different dielectric material that touches the core dielectric layer within the opening, an encapsulation layer over the magnetic core layer, and a fill material within the opening.

An electromagnetic device, comprising:

• an opening within a core dielectric layer of a first dielectric material, the core dielectric layer having a top surface and side surfaces within the opening;
• and
• a magnetic core within the opening, the magnetic core having a core top surface located below the dielectric layer top surface and having a first width, and sloped sidewalls that slope from the top surface towards the side surfaces to a bottom core surface located between the top surface and a device substrate and having a second width greater than the first width;
• and
• a barrier line located between the core dielectric layer and the magnetic core layer, wherein the barrier liner covers the sidewalls and underlies the magnetic core layer.