Inspection tool, inspection method and computer program product

An inspection tool comprising:

• an object table configured to hold a sample, the sample comprising a structure;
• a probing device configured to inspect the sample;
• a detector configured to detect a response signal of the sample caused by interaction of the probing device with the sample;
• a processing unit configured to:
• receive the response signal from the detector;
• generate an image of the structure based on the response signal;
• and
• receive a measurement sequence for inspecting the structure, the measurement sequence being obtained by:
• derivation of a model for a lithographic process as performed by a lithographic system, the model including a relationship between a set of system variables describing the lithographic system and an output variable representing the structure resulting from the lithographic process,
• determination of an observability of one or more system variables in the output variable, and
• determination, based on the observability, of a measurement sequence for the inspection tool;
• inspect the sample according to the received measurement sequence.