Optical microscope and spectroscopic measurement method
AssigneeNanophoton Corporation
InventorsMinoru Kobayashi, Shogo Kawano, Taisuke Ota, Shunichiro Matsuzaka, Yusuke Shiozaki, Shota Yamauchi
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AssigneeNanophoton Corporation
InventorsMinoru Kobayashi, Shogo Kawano, Taisuke Ota, Shunichiro Matsuzaka, Yusuke Shiozaki, Shota Yamauchi
Estimating the term…
An optical microscope according to one aspect of the present disclosure includes: a light source; a first scanner to scan a spot position of a light beam on a sample; an objective lens to focus the light beam deflected by the first scanner and cause the light beam to be made incident on the sample; a spectroscope including a slit on an incident side which an outgoing light emitted from an area on the sample onto which the light beam has been illuminated enters; a detector configured to detect an outgoing light from the spectroscope; and a first relay optical system including a first off-axis parabolic mirror that is arranged in an optical path from the first scanner to the objective lens and reflects the light beam deflected by the first scanner and a second off-axis parabolic mirror that reflects the light beam reflected in the first off-axis parabolic mirror.
An optical microscope comprising:
A spectroscopic measurement method for performing spectroscopic measurement by performing the following processing of:
Dependencies are inferred from the claim text.