Optical circuit for alignment
AssigneeNippon Telegraph and Telephone Corporation
InventorsToru Miura, Yoshiho Maeda, Hiroshi Fukuda
Life of this patent
Estimating the term…
Abstract
An optical waveguide in which a grating coupler is formed, a first pattern region arranged to surround the grating coupler, and a second pattern region arranged to surround the grating coupler are included. The first pattern region and the second pattern region are arranged adjacently. In a periphery of the grating coupler, the first pattern region is formed in a region continuous in a circumferential direction. Similarly, in the periphery of the grating coupler, the second pattern region is formed in a region continuous in the circumferential direction.
Claims10
An alignment optical circuit comprising:
- an optical waveguide in which a grating coupler is disposed;
- a first pattern region surrounding the grating coupler and comprising plural first patterns arrayed at a first pitch between each of the plural first patterns;
- and
- a second pattern region surrounding the grating coupler and comprising plural second patterns arrayed at a second pitch between each of the plural second patterns, wherein the second pitch is different from the first pitch, and wherein the first pattern region is adjacent to the second pattern region.
A method comprising:
- forming an optical waveguide in which a grating coupler is formed;
- forming a first pattern region surrounding the grating coupler and comprising plural first patterns arrayed at a first pitch between each of the plural first patterns;
- and
- forming a second pattern region surrounding the grating coupler and comprising plural second patterns arrayed at a second pitch between each of the plural second patterns, wherein the second pitch is different from the first pitch, and wherein the first pattern region is adjacent to the second pattern region.
Dependencies are inferred from the claim text.