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US 11,442,226 B2Granted
Integrated photonics optical gyroscopes with improved sensitivity utilizing high density silicon nitride waveguides
AssigneeAnello Photonics, Inc.
InventorsAvi Feshali, Mario Paniccia, Warren Bruce Jin
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Abstract
Aspects of the present disclosure are directed to structural modifications introduced in a waveguide structure in order to more tightly pack adjacent waveguide turns in an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit. Increasing number of turns of the gyroscope coil increases total waveguide length as well as enclosed area of the gyroscope loop, which translates to increased sensitivity to rotational measurement.
Claims12
An integrated photonics chip comprising:
- a waveguide coil comprising a plurality of waveguide turns looping around a central area enclosed by the waveguide coil, each waveguide turn being parallel to adjacent waveguide turns, wherein each waveguide turn comprises a waveguide core sandwiched between an upper cladding and a lower cladding;
- and
- a structural modification introduced on either side of each waveguide turn to reduce crosstalk between the adjacent waveguide turns, thereby increasing a spatial density of waveguide turns that can be fabricated within a predetermined area of the integrated photonics chip, wherein the structural modification comprises a gap.
Dependencies are inferred from the claim text.