System and method for forming diffracted optical element having varied gratings

An assembly, comprising:

• a first proximity mask positionable between a plasma source and a workpiece, wherein the first proximity mask includes a first set of openings permitting an angled ion beam to pass therethrough to form a first angled grating of each of a plurality of substrates on the workpiece;
• and
• a second proximity mask positionable between the plasma source and the workpiece, wherein the second proximity mask includes a second set of openings permitting the angled ion beam to pass therethrough to form a second angled grating of each of the plurality of substrates.

A system, comprising:

• a workpiece including a plurality of substrates, each of the plurality of substrates including a first angled grating and a second angled grating;
• and
• a plurality of proximity masks operable to partially intercept an angled ion beam delivered towards the workpiece, wherein a first proximity mask of the plurality of proximity masks includes a first set of openings permitting the angled ion beam to pass therethrough to form the first angled grating of each of the plurality of substrates, and wherein a second proximity mask of the plurality of proximity masks includes a second set of openings permitting the angled ion beam to pass therethrough to form the second angled grating of each of the plurality of substrates.