Testing apparatus

A testing apparatus comprising:

• a plurality of testing units arrayed in a first axial direction in plan view, the plurality of testing units being configured to respectively press probes against electronic devices on chucks to test the electronic devices;
• a plurality of gas circulating units respectively disposed in areas each corresponding to one or more testing units among the plurality of testing units, the plurality of gas circulating units respectively including first fans and second fans configured to circulate a gas in the areas along a second axial direction in plan view;
• a plurality of temperature detecting units configured to respectively detect temperatures of the chucks;
• and
• a controller configured to control drive of the first fans of the plurality of gas circulating units based on the detected temperatures of the chucks,
• wherein each of the plurality of gas circulating units includes a duct including a suction inlet and an exhaust outlet, the suction inlet being provided in a corresponding area of the areas on a first end side of the corresponding area in the second axial direction in plan view and being provided below a chuck in the corresponding area among the chucks, and the exhaust outlet being provided in the corresponding area on a second end side of the corresponding area in the second axial direction in plan view and being provided above the chuck in the corresponding area, and
• wherein each of the first fans is provided at the exhaust outlet of the duct and each second fan being provided at the suction inlet of the duct, such that the gas flows from the exhaust outlet to the suction inlet and along a side surface and a bottom surface of the chuck in the corresponding area.