Method and apparatus for detection of particle size in a fluid
AssigneeApplied Materials, Inc.
InventorsMehdi Vaez-Iravani, Todd Egan, Guoheng Zhao
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsMehdi Vaez-Iravani, Todd Egan, Guoheng Zhao
Estimating the term…
Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam.
A system for imaging a particle, comprising:
A particle imaging system, comprising:
A method of determining particle size, comprising:
Dependencies are inferred from the claim text.