Detection of surface particles on chamber components with carbon dioxide

An apparatus comprising:

• a distribution unit configured to generate a stream comprising at least one of solid CO2 particles or CO2 droplets;
• a controller configured to direct the stream comprising at least one of solid CO2 particles or CO2 droplets toward an article comprising a plurality of surface particles, wherein the stream causes at least a portion of the plurality of surface particles on the article to dislodge from a surface of the article;
• a laminar flow component configured to generate a laminar flow around the article to transport the portion of the plurality of surface particles that were dislodged from the surface of the article away from the article;
• and
• a substrate having a pre-determined initial state comprising surface particles on a surface of the substrate, wherein a surface of the substrate is to collect the portion of the plurality of surface particles dislodged from the surface of the article, and wherein the surface of the substrate is to be analyzed to determine at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged from the surface of the article and collected on the surface of the substrate.

An apparatus comprising:

• a distribution unit configured to generate one or more streams each comprising at least one of solid CO2 particles or CO2 droplets;
• a controller configured to:
• direct a first stream comprising at least one of solid CO2 particles or CO2 droplets toward an article comprising a plurality of surface particles for a first time period, wherein the stream causes a first layer of solid CO2 to be formed on the article, and wherein the first layer of solid CO2 causes at least a portion of the plurality of surface particles on the article to dislodge from a surface of the article;
• modify a temperature of the article to facilitate sublimation of the first layer of solid CO2 on the surface of the article;
• and
• direct a second stream comprising at least one of solid CO2 particles or solid CO2 droplets towards the article for a second time period, wherein the second stream causes a second layer of solid CO2 to be formed on the article, and wherein the second layer of solid CO2 causes an additional portion of the plurality of surface particles to be dislodged from the surface of the article;
• and
• a real-time aerosol sampling component configured to collect surface particles that are dislodged from the surface of the article, wherein the collected surface particles are to be analyzed to determine, in real-time, at least one of a particle number concentration, a particle size, or a particle size distribution.