Terahertz measuring device and terahertz measuring method for measuring objects to be inspected

Abstract

The invention relates to a terahertz measuring apparatus (1) for run-time measurements of test objects (8), in particular, for layer thickness measurements and distance measurements of the test objects (8), whereby the terahertz measuring apparatus (1) comprises: a transmitter and receiver unit (2) for emitting a terahertz radiation (10) along an optical axis (A) and for receiving reflected terahertz radiation, a controller and evaluation unit (3) for driving the transmitter and receiver unit (2) and evaluating measuring signals (M) of the transmitter and receiver unit (2). Hereby, it is provided that a beam splitter (4) is provided to split up the emitted terahertz radiation (10) into at least one first partial terahertz radiation (10a) and one second partial terahertz radiation (10b) along different optical partial axes (A1, A2), a reflection device (5) for reflecting the second partial terahertz radiation (10b) along a second optical partial axis (A2) different from the first optical partial axis (A1) of the first partial terahertz radiation (10a, 10b) and reflecting back the second partial terahertz radiation (10b), reflected from the test object (8), towards the beam splitter (4) and/or the transmitter and receiver unit (2), whereby the transmitter and receiver unit (2) generates a common measuring signal from the partial beams (10a, 10b) reflected on the test object (8) and puts it out to the controller and evaluation unit (3) for determining at least one layer thickness and/or one distance of the test object (8).

Dependencies are inferred from the claim text.