Solenoid valve system
AssigneeSMC Corporation
InventorsToshinori Kurata, Hiroshi Kubo
Life of this patent
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Abstract
A solenoid valve system includes a supply solenoid valve, a plurality of exhaust solenoid valves, and a valve control section controlling opening and closing operation of the supply solenoid valve and the plurality of exhaust solenoid valves using PWM or PFM. The plurality of exhaust solenoid valves are disposed in parallel with each other. The supply solenoid valve and the plurality of exhaust solenoid valves have substantially identical flow rate characteristics. The number of the plurality of the exhaust solenoid valves is twice the number of the supply solenoid valve.
Claims5
A solenoid valve system including a supply valve element opening and closing a supply channel that places an inlet port and an outlet port in communication, and a pilot valve portion configured to operate the supply valve element, the system comprising:
- a supply solenoid valve configured to control a flow rate of gas supplied to a pilot chamber of the pilot valve portion;
- a plurality of exhaust solenoid valves configured to control a flow rate of gas exhausted from the pilot chamber;
- a valve control section configured to control opening and closing operation of the supply solenoid valve and the plurality of exhaust solenoid valves using PWM or PFM control;
- and
- an operation mode setting section configured to select either a first operation mode where the plurality of exhaust solenoid valves open one time alternately or plural times alternately, or a second operation mode where the plurality of exhaust solenoid valves open simultaneously,
- wherein the plurality of exhaust solenoid valves are disposed in parallel with each other,
- the supply solenoid valve and the plurality of exhaust solenoid valves have substantially identical flow rate characteristics,
- a number of the plurality of exhaust solenoid valves is twice a number of the supply solenoid valve, and
- the valve control section is configured to control the opening and dosing operation of the plurality of exhaust solenoid valves based on the operation mode selected by the operation mode setting section.
Dependencies are inferred from the claim text.