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US 11,441,220 B2Granted
Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsKookchol Park, Suhyun Oh, Sokwon Noh
Life of this patent
Estimating the term…
Abstract
A deposition apparatus may include a chamber, a crucible in the chamber, a cover part covering the crucible, and 2n nozzles (where ‘n’ is a positive integer number) protruding from the cover part and arranged in a first direction. Among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle.
Claims20
A deposition apparatus comprising:
- a chamber;
- a crucible in the chamber;
- a cover part covering the crucible;
- and
- 2n nozzles (where ‘n’ is a positive integer number greater than 1) protruding from the cover part and arranged in a first direction,
- wherein, among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle is greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle,
- wherein the 2n nozzles comprise:
- one or more first nozzles inclined at a same, fixed first angle with respect to a vertical line perpendicular to a top surface of the cover part;
- one or more second nozzles inclined at a same, fixed second angle greater than the first angle with respect to the vertical line;
- and
- a plurality of third nozzles inclined at a same, fixed third angle greater than the second angle with respect to the vertical line, and
- wherein the one or more first nozzles, the one or more second nozzles, and the plurality of third nozzles are sequentially arranged with each other in this order from a center of the cover part.
9 more elements
A deposition apparatus comprising:
- a chamber;
- a crucible in the chamber;
- a cover part covering the crucible and including a top surface parallel to both a first direction and a second direction crossing the first direction;
- and
- a plurality of nozzles protruding from the cover part and arranged with each other in the first direction,
- wherein a distance between adjacent two of the plurality of nozzles is varied depending on a position, and all of the plurality of nozzles are inclined with respect to a third direction perpendicular to the top surface, and
- wherein the plurality of nozzles comprise:
- one or more first nozzles inclined at a same, fixed first angle with respect to a straight line parallel to the third direction;
- one or more second nozzles inclined at a same, fixed second angle greater than the first angle with respect to the straight line;
- and
- a plurality of third nozzles inclined at a same, fixed third angle greater than the second angle with respect to the straight line, and
- wherein the one or more first nozzles, the one or more second nozzles, and the plurality of third nozzles are sequentially arranged with each other in this order from a center of the cover part.
9 more elements
Dependencies are inferred from the claim text.