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US 11,440,866 B2Granted
Systems and methods for purifying solvents
AssigneeFujifilm Electronic Materials U.S.A., Inc.
InventorsYuan Chen, Eduardo Ramirez Romero, Bryan Hinzie
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Abstract
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used, e.g., as pre-wet liquids, solution developers, and cleaners in a multistep semiconductor manufacturing process.
Claims33
A method for purifying an organic solvent, comprising:
- distilling the organic solvent in a first distillation column to obtain an intermediate organic solvent, wherein the first distillation column has an inlet positioned at a location that is from about 80% to about 100% of the height of the first distillation column;
- transferring the intermediate organic solvent to a second distillation column, wherein the second distillation column has an inlet positioned at a location that is from about 0% to about 30% of the height of the second distillation column;
- and
- distilling the intermediate organic solvent in the second distillation column to obtain a distilled organic solvent.
1 more element
A system, comprising:
- a first distillation column having a first inlet and a first outlet, wherein the first inlet is positioned at a location that is from about 80% to about 100% of the height of the first distillation column;
- and
- a second distillation column downstream of the first distillation column and having a second inlet and a second outlet, wherein the second inlet is in fluid communication with the first outlet, and the second inlet is positioned at a location that is from about 0% to about 30% of the height of the second distillation column.
Dependencies are inferred from the claim text.