Process for producing polycrystalline silicon mass

A process for producing a polycrystalline silicon mass, the process comprising:

• vapor depositing silicon on a core wire to obtain a polycrystalline silicon rod, one end of the core wire being connected to a first electrode and the other end thereof being connected to a second electrode;
• extracting the polycrystalline silicon rod to an outside of a reactor;
• removing at least 70 mm of a polycrystalline silicon portion from an electrode side end of the polycrystalline silicon rod extracted to the outside of the reactor;
• crushing the polycrystalline silicon rod into polycrystalline silicon mass, and
• washing the polycrystalline silicon mass,
• wherein said washing comprises:
• prewashing, etching, oxidation treating with an aqueous solution of ozone to coat a surface of the polycrystalline silicon mass with a silicon oxide film, and drying.