Method for producing an aperture plate
AssigneeStamford Devices Limited
InventorsBrendan Hogan, Hong Xu
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AssigneeStamford Devices Limited
InventorsBrendan Hogan, Hong Xu
Estimating the term…
An aperture plate is manufactured by plating metal around a mask of resist columns having a desired size, pitch, and profile, which yields a wafer about 60 μm thickness. This is approximately the full desired target aperture plate thickness. The plating is continued so that the metal overlies the top surfaces of the columns until the desired apertures are achieved. This needs only one masking/plating cycle to achieve the desired plate thickness. Also, the plate has passageways formed beneath the apertures, formed as an integral part of the method, by mask material removal. These are suitable for entrainment of aerosolized droplets exiting the apertures.
A method of manufacturing an aperture plate wafer, the method comprising:
A method of manufacturing an aperture plate wafer, the method comprising:
A method of manufacturing an aperture plate wafer, the method comprising:
Dependencies are inferred from the claim text.