Three-dimensional silicon-based comb probe

A three-dimensional (3D) comb probe structure comprising:

• a carrier;
• a plurality of combs arranged in the carrier and spaced apart from one another;
• a plurality of shanks forming each comb of the plurality of combs, each shank of the plurality of shanks comprising a base portion and a stem portion extending from the base portion, a plurality of upper horizontal crossbars disposed on an upper surface of the base portion, and a plurality of vertical crossbars disposed on a surface of the stem portion and electrically connected to the plurality of upper horizontal crossbars, wherein the upper surface of the base portion is perpendicular to the surface of the stem portion and wherein a set of the plurality of shanks are joined together at the base portions thereof to form a respective one of the plurality of combs;
• a plurality of sensing elements disposed along the stem portion of each of the shanks and electrically connected to the plurality of vertical crossbars;
• a control chip disposed on the carrier and directly, electrically, connected to the plurality of upper horizontal crossbars, wherein the control chip is disposed parallel to the upper surface of the base portion;
• and
• a solder bump on each upper horizontal crossbar of the plurality of upper horizontal crossbars, wherein the solder bumps form an array directly, electrically, connecting the control chip to each shank of the plurality of shanks forming each comb of the plurality of combs.