Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer
AssigneeMerck Patent GmbH
InventorsM. Dalil Rahman, Huirong Yao, JoonYeon Cho, Munirathna Padmanaban, Elizabeth Wolfer
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Abstract
A coating composition, and uses thereof, including a solvent, metal oxide nanoparticles dispersed in this solvent, and a high carbon polymer dissolved in this solvent, where the high carbon polymer includes a repeat unit of structure (1), a hydroxybiphenyl repeat unit of structure (2) and a moiety containing a fused aromatic containing moiety of structure (3) where R1 and R2 are independently selected from the group of hydrogen, an alkyl and a substituted alkyl, Ar is an unsubstituted or substituted fused aromatic ring and X1 is an alkylene spacer, or a direct valence bound.
Claims31
A coating composition comprising an organic solvent, metal oxide nanoparticles dispersed in the organic solvent, and a high carbon polymer dissolved in the organic solvent,
- wherein the high carbon polymer comprises:
- (i) a repeat unit of structure (1):
- wherein R1 and R2 are independently selected from the group of hydrogen, an alkyl and a substituted alkyl;
- (ii) a hydroxybiphenyl repeat unit of structure (2):
- (iii) a moiety containing a fused aromatic moiety of structure (3):
- wherein Ar is an unsubstituted or substituted fused aromatic ring and X1 is an alkylene spacer or a direct valence bond;
- wherein the composition is comprised of 1 wt. % to 20 wt. % of the high carbon polymer.
A process of coating a hard mask composition on a substrate comprising steps a) and b):
- a) applying a composition comprising an organic solvent, metal oxide nanoparticles dispersed in the organic solvent and a high carbon polymer dissolved in the solvent onto a substrate to form a hard mask film, wherein the high carbon polymer comprises:
- (i) a repeat unit of structure (1):
- wherein R1 and R2 are independently selected from the group of hydrogen, an alkyl and a substituted alkyl;
- (ii) a hydroxybiphenyl repeat unit of structure (2):
- and
- (iii) a moiety containing a fused aromatic moiety of structure (3):
- wherein Ar is an unsubstituted or substituted fused aromatic ring and X1 is an alkylene spacer or a direct valence bond;
- and
- b) baking the hard mask film.
A coating composition comprising an organic solvent, metal oxide nanoparticles dispersed in the organic solvent, and a high carbon polymer dissolved in the solvent,
- wherein the high carbon polymer comprises:
- (i) a repeat unit of structure (1):
- wherein R1 and R2 are independently selected from the group of hydrogen, an alkyl and a substituted alkyl;
- (ii) a hydroxybiphenyl repeat unit of structure (2):
- and
- (iii) a moiety containing a fused aromatic moiety of structure (3):
- wherein Ar is an unsubstituted or substituted fused aromatic ring and X1 is an alkylene spacer or a direct valence bond;
- wherein the composition has a wt. ratio of the metal oxide nanoparticles to the high carbon polymer that ranges from 50:50 to 99:1.
Dependencies are inferred from the claim text.