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US 11,382,412 B2Granted
Method and apparatus for cleaning PVA brush
AssigneesEbara Corporation, Industry-University Cooperation Foundation Hanyang
InventorsJin-Goo Park, Jung Hwan Lee, Satomi Hamada
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Abstract
A PVA brush cleaning method includes immersing a PVA brush in a cleaning solution containing an organic matter, thereby removing a siloxane compound in the PVA brush; and applying vibration to the PVA brush, thereby removing impurities in the PVA brush.
Claims11
A PVA brush cleaning method comprising:
- immersing a PVA brush in a cleaning solution containing an organic matter, thereby removing a siloxane compound in the PVA brush;
- and
- applying vibration to the PVA brush, thereby removing impurities in the PVA brush;
- measuring a frictional property and an elastic property of the PVA brush from which the siloxane compound and the impurities have been removed,
- wherein the immersing and the applying are defined as a unit process, and
- the unit process is repeatedly performed when the frictional property and the elastic property of the PVA brush measured in the measuring are each below a respective reference range.
3 more elements
Dependencies are inferred from the claim text.