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US 11,377,724 B2Granted
Electron beam evaporator, coating apparatus and coating method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsEkkehart Reinhold, Joerg Faber
Life of this patent
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Abstract
In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.
Claims20
An electron beam evaporator, comprising:
- a tubular target;
- an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam;
- wherein the removal surface is a surface of the tubular target that extends conically or in a curved fashion from the free end edge, wherein an angle between a surface normal of the removal surface and a tube axis of the tubular target is non-zero.
A coating apparatus, comprising:
- a coating chamber having at least one coating region;
- at least one electron beam evaporator for coating a substrate in the coating region, the electron beam evaporator comprising:
- a tubular target;
- an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam;
- wherein the removal surface is a surface of the tubular target that extends conically or in a curved fashion from the free end edge, wherein an angle between a surface normal of the removal surface and a tube axis of the tubular target is non-zero.
2 more elements
A coating method, comprising:
- producing at least one vapor source on a removal surface of a tubular target by means of at least one electron beam,
- wherein the removal surface is a surface of the tubular target that extends conically or in a curved fashion from the free end edge, wherein an angle between a surface normal of the removal surface and a tube axis of the tubular target is non-zero, and
- coating a substrate by means of the at least one vapor source.
Dependencies are inferred from the claim text.