Load port

A load port adapted for wafer cassettes of different sizes and being capable of detecting storage states of wafers stored in the wafer cassettes, and the load port comprising:

• a body having
• a carrier base onto which a wafer cassette is loaded and having
• a slide groove formed through the carrier base;
• a positioning mechanism disposed on the body, positioning the wafer cassette loaded onto the carrier base, and having
• a positioning unit disposed on the carrier base of the body and having
• three positioning protrusions protruding out of a top surface of the carrier base;
• a hooking unit disposed in the body and having
• a driving assembly disposed in the body;
• and
• a hooking element mounted to the driving assembly, wherein the driving assembly drives the hooking element to extend out of the slide groove of the carrier base;
• and
• a limiting unit disposed on the top surface of the carrier base;
• a sensing mechanism disposed on the carrier base of the body;
• and
• a detecting mechanism disposed on the body, being on a side of the carrier base of the body, detecting the storage states of wafers stored in the wafer cassette, and having
• a first detecting assembly disposed on the body, and having
• a first driving element disposed on the body;
• a first L-shaped lever arm pivotally connected to the body;
• a first transmission element disposed on the body and connected to the first driving element and the first L-shaped lever arm;
• and
• a first detecting unit disposed on the first driving element and having
• two first detecting portions spaced apart from each other;
• and
• a second detecting assembly disposed on the body, located opposite to the first detecting assembly, and having
• a second driving element disposed on the body;
• a second L-shaped lever arm pivotally connected to the body;
• a second transmission element disposed on the body and connected to the second driving element and the second L-shaped lever arm;
• and
• a second detecting unit disposed on the second driving element and having
• two second detecting portions spaced apart from each other;
• wherein a distance between the two first detecting portions is smaller than a distance between the two second detecting portions.