Mode control of photonic crystal fiber based broadband radiation sources
AssigneesASML Netherlands B.V., ASML Holding N.V.
InventorsSebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
Life of this patent
Estimating the term…