Acoustic wave device, high frequency front end circuit, and communication apparatus
AssigneeMurata Manufacturing Co., Ltd.
InventorYutaka Kishimoto
Life of this patent
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AssigneeMurata Manufacturing Co., Ltd.
InventorYutaka Kishimoto
Estimating the term…
An acoustic wave device includes in order a substrate, an acoustic reflection layer, a piezoelectric layer, an IDT electrode including a pair of comb electrodes, and wiring electrodes. The acoustic reflection layer includes a low Z dielectric layer, a high Z dielectric layer below the low Z dielectric layer and having an acoustic impedance higher than that of the low Z dielectric layer, and a metal layer above the low Z dielectric layer and having an acoustic impedance higher than that of the low Z dielectric layer. When the acoustic reflection layer is viewed in plan, in a region encompassing the IDT electrode and the wiring electrodes but no IDT electrodes other than the IDT electrode, an area including the metal layer is smaller than an area including the high Z dielectric layer.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.