Techniques for vertical cavity surface emitting laser oxidation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
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Abstract
Some embodiments relate to a vertical cavity surface emitting laser (VCSEL) device including a VCSEL structure overlying a substrate. The VCSEL structure includes a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors. A first spacer laterally encloses the second reflector. The first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector.
Claims20
A vertical cavity surface emitting laser (VCSEL) device, comprising:
- a substrate;
- a VCSEL structure overlying the substrate, wherein the VCSEL structure comprises a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors;
- and
- a first spacer laterally enclosing the second reflector, wherein the first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector, wherein the first plurality of protrusions comprise two or more protrusions vertically stacked with one another over an upper surface of the optically active region.
A vertical cavity surface emitting laser (VCSEL) structure, comprising:
- a first reflector overlying a bottom electrode;
- an optically active region overlying the first reflector;
- a second reflector overlying the optically active region, wherein a sidewall of the second reflector comprises a curved sidewall segment overlying a straight sidewall segment;
- and
- a sidewall spacer structure laterally enclosing and contacting the first and second reflectors.
An integrated circuit, comprising:
- a first reflector overlying a substrate;
- an optically active region overlying the first reflector;
- a second reflector overlying the optically active region;
- a first spacer laterally enclosing the second reflector;
- and
- a second spacer laterally enclosing the first spacer, the first reflector, and the optically active region, wherein an outer sidewall of the second spacer comprises a first plurality of concave recesses spaced across a vertical distance defined between an upper surface of the second reflector and a lower surface of the first reflector.
Dependencies are inferred from the claim text.