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US 11,309,483 B2Granted
Piezoelectric element and liquid ejecting head
AssigneeSeiko Epson Corporation
InventorsHarunobu Koike, Koichi Morozumi
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Abstract
Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration NK1 (atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2 (atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0<NK1/NK2≤2.4.
Claims18
A piezoelectric element comprising:
- a first electrode provided above a substrate;
- a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode;
- and
- a second electrode provided above the piezoelectric layer,
- wherein an atom concentration NK1 (atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2 (atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0<NK1/NK2≤2.4.
2 more elements
Dependencies are inferred from the claim text.