Method of fabricating micro light emitting diode array substrate, micro light emitting diode array substrate, micro light emitting diode display apparatus

A method of fabricating a micro light emitting diode (micro LED) array substrate having a plurality of micro LEDs, comprising:

• forming a growth layer on a base substrate;
• forming a plurality of signal lines on the base substrate;
• depositing a semiconductor material on the base substrate to form a semiconductor material layer;
• and
• patterning the semiconductor material layer to form a semiconductor layer of the plurality of micro LEDs;
• wherein a surface of the plurality of signal lines away from the base substrate is uncovered during depositing the semiconductor material, the plurality of signal lines forming a grid for facilitating epitaxial growth of the semiconductor material;
• and
• the epitaxial growth of the semiconductor material being formed in direct contact with the growth layer.