Dummy vertical transistor structure to reduce cross talk in pixel sensor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsun-Kai Tsao, Jiech-Fun Lu, Shih-Pei Chou
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsun-Kai Tsao, Jiech-Fun Lu, Shih-Pei Chou
Estimating the term…
Various embodiments of the present disclosure are directed towards a pixel sensor including a dummy vertical transistor structure underlying a photodetector. The pixel sensor includes a substrate having a front-side surface opposite a back-side surface. The photodetector is disposed within the substrate. A deep trench isolation (DTI) structure extends from the back-side surface of the substrate to a first point below the back-side surface. The DTI structure wraps around an outer perimeter of the photodetector. The dummy vertical transistor structure is laterally spaced between inner sidewalls of the DTI structure. The dummy vertical transistor structure includes a dummy vertical gate electrode having a dummy conductive body and a dummy embedded conductive structure. The dummy embedded conductive structure extends from the front-side surface of the substrate to a second point vertically above the first point and the dummy conductive body extends along the front-side surface of the substrate.
A pixel sensor, comprising:
A pixel sensor, comprising:
A pixel sensor, comprising:
Dependencies are inferred from the claim text.