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US 11,309,321 B2Granted
Integrated structures containing vertically-stacked memory cells
AssigneeMicron Technology, Inc.
InventorsHaitao Liu, Chandra Mouli, Sergei Koveshnikov, Dimitrios Pavlopoulos, Guangyu Huang
Life of this patent
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Abstract
Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, and having vertically-stacked memory cells within the conductive levels. An opening extends through the stack. Channel material is within the opening and along the memory cells. At least some of the channel material contains germanium.
Claims9
An integrated structure comprising:
- a stack of alternating dielectric levels comprising a dielectric material and conductive levels that comprise a conductive material that physically contacts the dielectric material;
- vertically-stacked memory cells within the conductive levels, each of the vertically stacked memory cells comprising a charge trapping region, the dielectric material of the dielectric levels extending over and beneath the charge trapping region across an entirety of a width of the charge trapping region;
- an opening extending through the stack, the opening having a sidewall extending vertically continuously from top to bottom of the opening;
- and
- a first channel material liner within the opening and along the memory cells and directly against the dielectric material of the dielectric levels, the first channel material liner comprising tin oxide having a thickness of from one monolayer to 60 Angstroms;
- and
- a second channel material comprising germanium within the opening and spaced from the sidewall by the first channel material.
4 more elements
Dependencies are inferred from the claim text.