Back to results
US 11,309,245 B2Granted
Semiconductor device with metal spacers and method for fabricating the same
AssigneeNanya Technology Corporation
InventorKuo-Hui Su
Life of this patent
Estimating the term…
Abstract
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate having a plurality of contacts, a plurality of plugs positioned above the plurality of contacts, a plurality of metal spacers positioned above the plurality of plugs; and a plurality of air gaps respectively positioned between the plurality of metal spacers.
Claims19
A semiconductor device, comprising:
- a substrate;
- a plurality of plugs positioned above the substrate;
- a plurality of metal spacers positioned above the plurality of plugs;
- and,
- a plurality of air gaps respectively positioned between the plurality of metal spacers;
- wherein the plurality of metal spacers comprise a first set of metal spacers, a second set of metal spacers, a third set of metal spacers, and a fourth set of metal spacers;
- wherein the second set of metal spacers is positioned between the first set of metal spacers and the third set of metal spacers, and the third set of metal spacers is positioned between the second set of metal spacers and the fourth set of metal spacers.
4 more elements
A method for fabricating a semiconductor device, comprising:
- providing a substrate;
- forming a plurality of plugs above the substrate;
- forming a plurality of metal spacers above the plurality of plugs;
- and,
- forming a plurality of air gaps positioned between the plurality of metal spacers;
- wherein the plurality of metal spacers comprise a first set of metal spacers, a second set of metal spacers, a third set of metal spacers, and a fourth set of metal spacers;
- wherein the second set of metal spacers is positioned between the first set of metal spacers and the third set of metal spacers, and the third set of metal spacers is positioned between the second set of metal spacers and the fourth set of metal spacers.
4 more elements
Dependencies are inferred from the claim text.