Package component, semiconductor package and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Yu Liang, Kai-Chiang Wu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Yu Liang, Kai-Chiang Wu
Estimating the term…
A package component, a semiconductor package and a manufacturing method thereof are provided. The package component for electrically coupling a semiconductor die includes an insulating layer, a functional circuit structure embedded in the insulating layer within a functional circuit region, and a seal ring structure embedded in the insulating layer within the seal ring region surrounding the functional circuit region. The semiconductor die disposed on the package component is electrically coupled to the functional circuit structure. The seal ring structure is electrically isolated from the functional circuit structure. The seal ring structure includes a stack of alternating interconnect layers and via patterns, and the via pattern at each level of the stack includes first features spaced apart from one another and arranged at neighboring corners of the seal ring region.
A package component for electrically coupling a semiconductor die, the package component comprising:
A semiconductor package, comprising:
A manufacturing method of a semiconductor package, comprising:
Dependencies are inferred from the claim text.